POWATEC Wafer UV Curing System U-300

The U-300 UV-LED exposer is a very efficient solution for exposing UV film. Usually, this step takes place after the separation of the wafer to reduce the adhesion force when picking the die. The use of this curing device ranges from creating development samples in R&D departments, start-ups, or universities to series production in large companies for a throughput of up to 200 wafers per hour. This device can be used to expose commercially available UV films of the leading manufacturers, with an average wavelength of 365nm exclusively in the UVA range.
By using LEDs instead of traditional means, there are numerous advantages that are gained including longer lifetime, lower maintenance costs, no warm-up time, and no ozone gas or dangerous mercury gas generation. In contrast to common mercury vapor lamp systems, this device does not require a long warm-up time and is ready for use immediately upon being turned on. Also, with the use of our potentiometer, the conveyor speed and thus the exposure time can be precisely adjusted according to the specification of the UV film. With the U-300 and its 72 high powered LEDs, an adjustable dose between 145 and 1520 mJ/cm2 per working cycle can be achieved. Higher doses can be achieved by exposing the substrate a second time immediately after the first pass.
Very short set-up times, low operating costs, small footprint, and the high quality end results have made the U-series from Powatec a product that has been in great demand internationally in cleanroom applications for 15 years.
For more information, contact POWATEC at info(at)powatec.com.