I can not thank you enough for this concise explanation and demonstration of vacuum pump options and their roles. This is easily the best I've seen here and am surprised it’s not more watched. I appreciate your enthusiastic methods Nan and Callie's adorable demonstrations. It seems you have some great resources that will be helpful on my current project, CVD & Czochralski crystal growth.
I assume the roughing pump is not run 'through' the turbo pump, if this is the case is the path to the roughing pump switched via valves from chamber to turbo pump output?
A cryo pump has an upper limit regarding the total amount of gas it can pump; this limit is termed the ‘cross-over rating’ or CR. If you exceed this limit, the pump will not be able to function properly, will over-heat, and shut down. The “Ideal Gas Law” tells us that the amount of gas present in any closed system is proportional to the product of the pressure and volume, or P x V (P=pressure, V=volume). So, if a cryo pump has a given CR, and we need to know the maximum pressure at which we can operate that pump, we simply divide CR by V. This gives us a pressure to which we must pump down the chamber (with a mechanical pump) before using the cryo-pump.
Love these vids! They have really helped me acclimate to my new role within the semiconductor industry
I can not thank you enough for this concise explanation and demonstration of vacuum pump options and their roles. This is easily the best I've seen here and am surprised it’s not more watched. I appreciate your enthusiastic methods Nan and Callie's adorable demonstrations. It seems you have some great resources that will be helpful on my current project, CVD & Czochralski crystal growth.
Thanks for watching! We're happy you enjoyed the video.
Nice and smooth explanation with no stress on voice. Sounds like listening to a kids-story!
Extremly well and elaburately explained. Thanks
This video is extremely good! I'm surprised it's not as popular.
just wowww ..... thank you for this explanation and animations
Wow!!! Great video! I work at AMAT and install these on the daily!
Great to know the difference between the two and how they works :)
Extremely well explained. The whole series is amazing. Thanks a lot!
Very informative !!
Glad you think so!
Turbo Molecular pumps also have the problem of being destroyed by accident venting of the chamber to higher pressures.
very good and easy to understand
thanks
wow! great teaching!!! I understand better now!!
Very interesting the explication
amazing content
best video , yes we enjoy this lesson
Great tutorial. Thanks Jan
amazing
great video! i don´t really know why i watched the full thing since this isn´t particularly useful to me. But still, great video :D
Really educational.
Thank you.
I assume the roughing pump is not run 'through' the turbo pump, if this is the case is the path to the roughing pump switched via valves from chamber to turbo pump output?
That is correct
where is the outlet of the mechanical pump linked to? Is it linked to low pressure air in the machine?
The outlet of the mechanical pump simply goes into the room (or into exhaust ducts in cases where potentially dangerous gases are used).
What is a cross over rating? I didnt quite get that part...
A cryo pump has an upper limit regarding the total amount of gas it can pump; this limit is termed the ‘cross-over rating’ or CR. If you exceed this limit, the pump will not be able to function properly, will over-heat, and shut down. The “Ideal Gas Law” tells us that the amount of gas present in any closed system is proportional to the product of the pressure and volume, or P x V (P=pressure, V=volume). So, if a cryo pump has a given CR, and we need to know the maximum pressure at which we can operate that pump, we simply divide CR by V. This gives us a pressure to which we must pump down the chamber (with a mechanical pump) before using the cryo-pump.
Thank you.
You're welcome!