I'm ecstatic to see such content presented in such a wonderful way. You have my appreciation for your efforts. It was quite beneficial to me in many ways.
Fantastic instructional video, i'll be showing it to my MicroElectroMechanical Systems (MEMS) students at Lorain County Community College. We teach them how to be a sputter operator in our cleanroom this is always helpful in the early parts of the associates degree. Thanks much, and well done!! ~Johnny V
Depends on the pressure of the system, but it ranges in the many hundreds to roughly a thousand volts. Also the plasma initiation voltage is higher than the voltage required to sustain the plasma in most cases, so a striking voltage is used similar to how tig welders have a high frequency start.
10:35 Does varying the negative voltage also affect the sputter flux in addition to the shutter position? Or is the voltage only effective in a specific window? If sputtering was performed for the reverse process, like sandblasting to clean a surface; would a specific voltage achieve selective un-deposition of an element? Or do the Argon ions just crash and thrash any atom from the substrate?
how do you guys keep the inside of the machine so clean? we use e beam deposition and coat the inside with tin foil to protect the walls, which we change every month or so
We install removable metal panels called “shields.” The shields are coated with textured aluminum film (deposited via flame spray technique by a commercial supplier). All the materials we deposit build up on the shields. The textured aluminum coating prevents the materials from flaking / peeling. Every few months we replace the shields. The old shields are sent to a commercial vendor, where the aluminum and all deposited materials are chemically removed and collected for recycling. The used shields are then cleaned and re-coated with aluminum and sent back to us for re-use.
Wonderful presentation! I came across this question and I want a better explanation to it. Why is it a bad idea to use a metallic zinc as a substrate holder ?
A very wonderful and interesting explanation 👍🏻👍🏻👍🏻. I have a question. What is the cause of the phenomenon of plasma formation, is it the charged atoms of argon gas, or the process of its collision with the target, or when the target atoms are removed, or is it the result of the three operations together, and thank you very much for this beautiful explanation 😊
I'm ecstatic to see such content presented in such a wonderful way. You have my appreciation for your efforts. It was quite beneficial to me in many ways.
So happy to see such content presented so elegantly. Thank you for your effort. It was very useful for me.
Fantastic instructional video, i'll be showing it to my MicroElectroMechanical Systems (MEMS) students at Lorain County Community College. We teach them how to be a sputter operator in our cleanroom this is always helpful in the early parts of the associates degree. Thanks much, and well done!! ~Johnny V
I would feel offended if i was shown a video that treats me like a 10 year old instead of a proper lecture.
@@NIOC630 oh yes mr 400 years old dwarf legend, plz leave these mortal videos to us and watch something much more advanced then.
awesome concept explanation with very good demonstration.!!!
very informatic and clear explaination. Thank you😍😍😍
Of course, glad it was helpful!
We are lucky to be able to see these videos for free
Glad you enjoyed them!
very effective explanation thank you. Please also explain the sputtering variants.
Very cool.
What voltage is required to form the plasma?
Depends on the pressure of the system, but it ranges in the many hundreds to roughly a thousand volts. Also the plasma initiation voltage is higher than the voltage required to sustain the plasma in most cases, so a striking voltage is used similar to how tig welders have a high frequency start.
Awesome video❤
Very very very informative and clearly explained
Glad it was helpful!
bundle of thanks for this video 👌
Excellent explanation !
Thank you!
Superb 👍
10:35 Does varying the negative voltage also affect the sputter flux in addition to the shutter position? Or is the voltage only effective in a specific window? If sputtering was performed for the reverse process, like sandblasting to clean a surface; would a specific voltage achieve selective un-deposition of an element? Or do the Argon ions just crash and thrash any atom from the substrate?
Amazing thanks for this video...
Most welcome 😊
謝謝你們的教學
Vividly, great job! Thanks for this clear demonstration.
how do you guys keep the inside of the machine so clean? we use e beam deposition and coat the inside with tin foil to protect the walls, which we change every month or so
We install removable metal panels called “shields.” The shields are coated with textured aluminum film (deposited via flame spray technique by a commercial supplier). All the materials we deposit build up on the shields. The textured aluminum coating prevents the materials from flaking / peeling. Every few months we replace the shields. The old shields are sent to a commercial vendor, where the aluminum and all deposited materials are chemically removed and collected for recycling. The used shields are then cleaned and re-coated with aluminum and sent back to us for re-use.
Great question. Very interesting answer. I did not know about flame coating aluminum. Cheers!
thank you duke university
Wonderful presentation! I came across this question and I want a better explanation to it. Why is it a bad idea to use a metallic zinc as a substrate holder ?
The zinc in the holder, could also act as a target and contaminate your thin layer.
A very wonderful and interesting explanation 👍🏻👍🏻👍🏻. I have a question. What is the cause of the phenomenon of plasma formation, is it the charged atoms of argon gas, or the process of its collision with the target, or when the target atoms are removed, or is it the result of the three operations together, and thank you very much for this beautiful explanation 😊
Please elaborate mechanism of interaction between ionization and nature of collisions between positive Ar ions and target.
Regards
Thank you!
More than Great
Thank You
thanks for sharing
Nice video with the handeling of the machine, substrate and inputs.
Thanku
Oleeeee oleeee y oleeeee
we are manufacturer of magnetron sputtering source for pvd coating machine.
y aún no encuentro el voltaje con el cual estoy haciendo los depósitos 😂😂😂😂😂
looks like a machine made in a garage workshop