Building a Small Cleanroom for Photolithography.
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- Опубликовано: 8 июн 2024
- This video describes the design- and build process of a small cleanroom space for my workshop. In addition to facilitating working more cleanly, it also allows for working with dangerous substances, such as strong fuming acids, and can be used for processing photoresists. It's build from approx. 5m2 of trespa plate material and uses a HEPA filter and a fan to achieve a steady supply of clean air.
0:00 Introduction
0:47 Cleanroom classifications
2:10 Design considerations
4:33 Construction
7:10 Lighting conditions inside the cupboard
7:57 Air flow control
9:24 Conclusion 
Наука
I use to work in the R&D lab at the factory where those Siemens drives were made. The high pitch sound is the switching frequency of the inverter. There should be a setting to set it above the audible frequency range. I believe its slightly less efficient but it's probably worth it if you have hearing like a dog. Look for a pdf manual if you haven't already got one. 👍
Thanks, yes it was solved by changing the frequency
on many VFDs you can change the control frequency to a higher value. It typically de-rates the output current slightly but that shouldn't be a problem normally. The higher frequency is less audible.
Designing and building these cabinets is actually my daily job. You made some good decisions and only very few bad ones. Airflow can be tricky to predict. Overall not bad!
Your content is pure gold!!!! Thank you Sir.
After watching a few videos, namely the micro-telecope ones, this channel became my favourite engineering ans science channel on RUclips! Thank you for making such amazing videos!
Your channel is pure gold! Please keep us updated, there are soo few resources regarding photolithography on RUclips it makes you a saint :)
Brilliant. Please continue posting, I love people with passion like you!
Excited to see future projects on this stage!
Nice fume hood / mini clean room combo! Can't wait to see the results with your homemade ICs.
"Silicone kit" in English is
"Silicone sealant"
Acrylic and some other types are called "caulking" or "caulk", the difference being elasticity.
Great project as ever, the overpressure underpressure schematics were very helpful and i never understood how these cabinets were safe.
How nice !..can't wait to see you work in it...cheers.
Very useful! Thank you so much for sharing! I’ve been daunted by some sterilization projects recently, but I could absolutely keep a small clean room clean!
A great and familiar example of the 2nd law of Thermodynamics. Ever since I learned about this law I've used it to explain to my girlfriend why I (had to) made a mess (again). Unfortunately she wasn't good in physics....
That might be coil-whine you’re hearing, which I think can be alleviated with silastic around the coils themselves. Should be plenty of information on people removing coil-shine from PC builds out there.
Very nice! I subscribed to your channel as I am working on a planetarium projector where I need to make 32 "star plates" lithographically. Some of the pin holes are in the tens of microns. I want to approach this with direct write laser lithography by adjusting the focus of 405nm laser into a microscope lens at a fixed height over an XY stage. This should allow me to expose a photoresist on aluminized glass and make pinholes of various sizes. We'll see... I think I am going to need to come up with something similar, as the XY stage will take some time to move to the next pin hole exposure position and could gather dust in that time.
It might be worthwhile adding a carbon filter and high power uv source into a closed box pre fan and hepa filter. This will drasticly improve the quality of incoming air
Looks very nice, I would assume that it is way better than class 1000, at least if you turn it into a proper glove box or cover the holes with "brushes" (I don't know the proper name of these).
A possibility to improve the class is to recirculate some of the exhaust air. If memory serves me well from my clean-room time, 80% of clean room air is re-circulated and only 20% fresh air for the typical class 100 room.
I think the main issue with that is that it would necessitate a separate exhaust for the hazardous materials, but definitely very practical if he builds a second one for the wafer stepper!
One way of getting at least some idea as to the quality of the air is to insert a reflective black surface into the box. In a semiconductor lab all of the tools are usually white, but at least some of the reason is that white doesn't so dirt. :)
I love your channel sir thank you so much
Brilliant!!!!
Dude your channel is awesome just found you
Perfect for mycology work
As mentioned in the comments before, you should try to etch glass with KOH. This is much safer and you dont need HF for good results. In the institute where I work, we etch laser modified fused silica every day with a selectivity of 1000, which is quite sufficient to produce microfluidic devices, waveguides or whatever you want. When you want to look for further readings, search for SLE or selective laser etching.
Thanks for your suggestions. Actually, I did look into it and my first impression was that the rate of etching of KOH was much lower that that of HF. However, I did not consider SLE. So my plan is to do a video in which I will look further into the different options.
Отлично! так держать!
_"Total chaos"?_ THAT describes _MY LIFE..._ 😊
You had me worried at first with the overpressure design - great for clean rooms but not for personal safety with HF. The final design is exactly what you need - an air curtain and an under pressure zone to draw away HF fumes.
Why not make a wall design with a pressure design in the wall, and the inside is a low pressure zone, it will create a quite effective barrier.
Check the corrugated exhaust pipe as it seems to me to be the pipe which is not a single casting but obtained by wrapping a strip of aluminum along the circular surface to match the corrugation. There may therefore be microscopic gaps along the outer surface of the pipe from which the toxic gas could escape.
This pipe is at a under pressure compared to the surroundings. So although theoretically it could leak fumes to the outside if it contains leaks, this is quite unlikely.
7:57 You can use PC fan with PWM (4 wire) or other DC blower with PWM signal speed control.
1:50 you are chemist , optical engineer , radio engineer , software engineer electronic engineer and so on
I am impressed i would like to watch your profession biography . ☺️☺️
One word: researcher.
Now i need that to install phone screen protectors.
This has been on my mind of late, but once constructed, what is the procedures in keeping the space clean, as well as the transistor procedures for elements introduced into the chamber?
Neat project! I am interested in the material you used, but couldn't find any translations. What is Ki-Kern? It looks like phenolic resin sheets, but I am not certain.
Wow !!!
nice
Hello, try changing the pwm frequency on the vfd,( maybe P076) this has an big effect on the noiselevel of the motor.
This is a wonderful project, was a vibration isolation an issue? And did you want or consider a positive pressure glove box, recirculating clean air with exterior exhaust?
I did not have issues with vibration isolation. Also I did not really consider a closed system glove box for this purpose, because it would require an air lock to get things in and out and this would complicate things quite a bit.
Great video! Can you use glovebox with HEPA filter inside regular fume hood?
yes, that is also possible. You just have to take care that the exhaust of your fume hood does not somehow suck dirty air into your clean area.
Perhaps you could use a pure sine inverter.
Elevated entropy, wife's good excuse to scold husband.
Starting at about 05:32 in this video: That answered the question I was going to ask, which was could you substitute aluminum [aluminium] panels for the building material you used.
{I suspected something like that might be the case.}
This was in one of my project list ...
Because i cant repair my Hdd in open air room
Awesome!!
A qualitative measurement of the quality of your clean room is actually fairly easy. Use it to put a screen protector on your cell phone. Any dust within the containment area will immediately transfer to the screen protector by the unstoppable force of Murphy's law.
There are some typo numbers on cleanroom standards page, Class 100
Regarding the motor driver and the high pitch noise… You can try some of inductor “donut rings“ which are commonly needed for motor drives and noise issues.
Check out the RUclips channel “clough42”
He’s the guy to talk to and has several wonderful videos regarding VFD‘s, motor drives, wiring, noise issues Both electrical and audible noise. He’s a genius, and is capable of the most complex work… Although he sticks to mostly machining and electronics diagnostic stuff… He’s a really smart dude and is capable of much more complex work than the stuff he shows on his RUclips channel.
I think it’s just the switching speed of the transistors which is causing the noise and I don’t think there’s anything that can be done about that but I could be wrong. I have heard of tweaking the switching speeds so that it is out of the audible range.
Do have to keep the fan constantly on at all times, or do I only need to on it when an using the clean room?
Hi
It is good idea to use closed outdoor rackmount server with modification to use for cleanroom like this ?, my main purpose is also for photolithography and hard drive repair..., main components is steel plate with powder coating paint, I will use acrylic for front door access and lighting just like yours and blower fan with HEPA, also silicon sealant and aluminum tape for closing air leakage
I think that would work, especially if it's a closed system. But open server systems would also probably work, as long as they are not filled with dust when they go in the clean room space.
@@HuygensOptics No, It's closed rackmount system and designed for outdoor cell tower system, by default is IP55
Damn RIP to that student. Be careful people.
Do u need to control Relative humidity?
4:15 or use a glove system like a sandblasting booth or things kinda like cloakas?
So far just ordinary gloves. But it is an idea to use these in the future.
Is it safe to just dump HF fumes outside? I was under the impression that you'd need to neutralise it as it's toxic in quite low concentrations.
I believe the inverter is using a high frequency carrier wave within the audible range. You can try and change the settings for it according to your manual or it might be changed via a manufacturer firmware. This video discusses the issue using a different inverter or VFD: ruclips.net/video/Z9cGXScBH88/видео.html
Tapping trespa is tricky. Especially on the sides.
I need to clean a lowpass filter and an image sensor, but without a cleanroom, it's nearly impossible to do.
What are you using to clean glass ? I mean, I have to fight dust, lint, streaking and surfaces, which are electrostatic charged thus dust sticks to it like crazy.
Desktop Ionizer winstat bf-xmb & HYPER CLEAN EE-6310 ?
I don't have a look of problems with electrostatic charge and guess that is because I live in a fairly humid climate. You might want to try a humidifier.
😊Money!
9:15 your PHONE has a pressure sensor? Is this a standard piece of equipment which comes on cell phones??
Probably your phone does too. You can find out by installing for example Phyphox or another app that can access all sensors inside your phone. The phone shown is a Google Nexus 5.
@@HuygensOptics This is AMAZING! Dude you're better at technology than I am!
Yes, most phones have barometer/altimeter chips in them, as well as 3d compass, 3d accelerometers and 3d gyros.
5:52 than what's that ? Glove box ?
To the left is a sandblasting cabinet.
Was that Morse at the end- Q? Anyway, inspiring video as always 👍
That info is strictly on a "need to know" basis. 😉
I just need to know the radix. Will accept challenge for hamburgers. 🧐
@Huygens Optics Hi Jerome can you make a video for safe practices for small quantity handling (and disposal) of Hydrofluoric Acid ? I copied this video in a post on PM-Forum (Practical Machinist) - thread " Hydrofluoric nitric acid pickling" [Mainly your clean room / HF hack], seems they could really use some of your advice / experience there that I'm sure would be greatly appreciated. The OP is wanting to use quantities smaller than 250 mm and parts are less than 1" x 2" . Cheers ~ Exciting channel BTW.
I will do a video on glass etching in general, probably at the end of this year.
@@HuygensOptics Awesome ! Look forward to it !
Hi what name of the color filters
What are your plans for this clean room?
The only way to really reduce the VFD noise is to turn up the switching frequency.
Thanks, so I guess it is pretty hard to get rid off since you generally cannot change the switching frequency of inverters.
@@HuygensOptics Yeah, just a case of a more expensive, higher frequency VFD.
Damn. I had hoped I could just add a few capacitors between the 3 phase lines or something. But given your comments, that is probably not a good idea...
@@HuygensOptics for just an inverter it would probably have to be corrected in the design of the inverter itself
@@HuygensOptics you get filters from Siemens.... siemens.inverterdrive.com/group/EMC-Filters/ is a start, but they almost cost more than the inverter. You would need the optional line reactor as well, which is definitely more than the inverter, try to change switching frequency to 16kHz from the default 8, as if you are older you will not hear it.
Whats name or type the color filters that you use
I don't know, I just ordered UV filter material online. It is not special clean room grade.
I would be terrified of working with HF
Regarding the light color, maybe you should have red, green or blue LED also, and not use color filters for that.
8:15 using a dc motor could solve the issue.
I have never seen something being referred to as "class 10,000“
www.americancleanrooms.com/cleanroom-classifications/
Isn't HF the bone melty juice?
Binds to calcium and will mess up your day... badly.
The good news is you’ll only have one day for it to mess up.
Note to self: Do your best to avoid _"CONCENTRATED HYDROGEN FLUORIDE SOLUTIONS."_ 😦
How to build a Clean room: Buy Clean room Equipment. ;) just a joke
That would be another video titled: "buying a little cleanroom for photol..."
Please stop "Builing" cleanroom lets all be friendly xD