How Carl Zeiss Crafts Optics for a $150 Million EUV Machine
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- Опубликовано: 2 июн 2024
- Extreme Ultraviolet Lithography is the next step on the semiconductor fabrication roadmap. It is a disruptive technology using a new ultraviolet wavelength.
Dutch company ASML is currently the only company shipping these million dollar machines. But ASML in turn relies on Carl Zeiss in Germany for the all-important optics system. The two are intimate strategic partners.
The key issue that ASML and Carl Zeiss engineers had to overcome is that high-energy UV light gets absorbed by virtually all materials, which means that lenses are not feasible. The lens material will literally just eat up those rays. Thus, Zeiss crafted an optics system entirely out of multi-layer mirrors.
It is super cool. In my last video I gave a brief overview of Carl Zeiss the company and a few of their products. In this follow up, we are going to go deeper and look at how Zeiss made a EUV optics system.
Errata: (You can tell I was getting tired.)
5:30 - I suck at math. 17,622 meters high, not 780 meters
11:00 - The mirror is coated last. Multi-layer deposition goes first
11:30 - 0.5mm
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Hope you enjoyed the video. Got a topic suggestion for a future video? Let me know about it
Would you consider doing an overview of the semiconductor industry in Russia?
Back end big players like Advantest, ASE global, etc.
Why not do a series on the history of semiconductor chip fabrication machines? Very similar to this video but the history of each machine leading up to current processes.
@@mecha207 That is a cool idea. Could also do a series on the different machines used. Everyone only talks about the lithography machines but there are so many deposition, ething, plating, cleaning, melting, cutting processes you could make a whole channel.
The story of how modern chip lead frames are produced is pretty cool as well. They used to be etched and really expensive until this Chinese guy from a progressive stamping factory took a tour of the semiconductor museum in Japan or California, and saw them there. He knew he could make them much faster and cheaper. He pretty much cut the price of production 100 fold over night.
The story of the wafer dicing saw blades is also really interesting. They are really fast spinning "foil" discs.
Or how Japan came to be such a transistor powerhouse and the calculator wars.
Maybe do some videos on robotics? FANUC is a good place to start.
As an ASML engineer all that I can say is that you know way too much 😂😂
You were spot on with many details that it took me a long time to learn even inside the company, it's a very impressive research job you've done for this video, as many others
Congrats on the channel and keep up the good work! 👌
Thanks for taking part in my PC's GPU and CPU ;p
Then I‘ll apologize in advance for any scratches I didn’t see on the lenses. 😅 I‘m new to my job.
As an Zeiss Engineer I would tend to agree
Thanks for constructing most of the world's tech!
The greatest compliment my dad ever gave to one of his phd students was “I can’t tell you how accurate that presentation was”. He was a phd leader for nuclear physics
sequence error at 11:00 - multi-layer coated mirrors like this ABSOLUTELY cannot be touched, let alone polished, after being coated. The coating and its reflective properties would be instantly destroyed. All the super polishing has to be done to the substrate BEFORE the multi-layer deposition step. After coating, the mirror is done and must remain absolutely pristine.
correct
My bad. I got mixed up.
You can clean those optical surfaces with CO2 "snow" blasters.
We cleaned the Kepler Space Telescope mirror with that before launch.
I believe Northrup did the same with the JWST mirrors.
@@stuartgray5877 CO2 cleaning is non-abrasive. I doubt it could remove the tin contamination adhered to the surface. Also this is a DEEP vacuum UV mirror, any introduced microroughness is going to be a vastly bigger problem for scatter loses than it would be on an IR mirror like jwst
Yeah I was like if you polish it won't the atomic surface get destroyed. Thanks for the heads up.
I retired from a company that supplied both Zeiss and ASML with glass blanks for their lenses.... We would get Zeiss visitors to the plant occasionally and almost every person would have Dr. before their name... You better have good people in final inspect because they expect zero defects....thanks for the video...very interesting..
What's their name
@@Kobs.ASorry, the expectation from the company was that we didn't say anything about the process to make the glass or our customers, so in retirement I continue with their wishes...
@@stitchergary just the name of the company. Omg is it a secret society
@@Kobs.A YES
@@stitchergary lol, no problem
Damn they went from designing the optics on panzers to the optics which makes the processors we use to simulate said panzers.
Way to step up in life
I'm not a scientist or a part of the tech industry, I'm just a humble truck driver with a curious mind. Hell, I barely understand how a transistor works.
But watching this series on EUV is absolutely blowing my mind, even though I only understand like half of it.
Mirror so perfect that it would look absolutely flat even if blown up to the size of the United States... generating this impossible ultra-ultraviolet light by shooting drops of molten tin with a laser twice, 50,000 times a second... and then the transistors on the chip are so tiny that we can't even see it, even with a electron microscope! And yet it works, and I can buy it at Best Buy for a few hundred bucks.
Amazing what humans can come up with
It seems that you would have the mind for more complex jobs than driving if you ever want to apply for such a job.
One correction, @11:30: "If that 450mm mirror was blown up to the size of the United States, 4500 km ... then 50 picometers would be just 0.4 micrometers." Actually, 0.5mm, which is pretty astonishing.
My bad. I’ll edit the description.
1/20th of a nm is much smaller than a Si atom (3 to 5 per nm depending on lattice structure direction). Considering the wave nature of light, the reflection bounces off a large surface. Keeping everything stable & accurate across such a large surface must employ magic
So wait... they actually polish the mirror to this spec, and it's not a result of super smooth coating? HOW?!?!
@@TigeroL42 See pp 19-22 in "Optics for EUV Lithography" Migura 2019.
나도 이거 보고 이상해서 계산해 봤는데 ㅎㅎ
I'm a physicist and just walking through the the different kinds of physics, which need to be mastered to build this beast makes me excited like a 5 year old in a Toy R Us.
Building an airplane is just childs play and "rocket science" does not come close.
I'm just mentioning the physics involved in operating it. I'm leaving out all of the manufacturing.
- Classical optics
- Laser physics and optics
- Non linear optical effects
- Plasma physics (some of it based on inertial fusion research)
- X-Ray physics (we are pretty close to the X-Ray domain so some aspects already apply
- Gas diffusion
- Large scale precision mechanics (relative stability under stress, temperature changes, gravity)
- micro-mechanics
- electrical systems galore
- Thermal management aka heat dissipation
- Acoustics (avoiding and managing vibrations)
- All kinds of sensors - acoustical, thermal, magnetical, optical (stretching the definition), radio, dimensional, gravimetrical
...
I am convinced that the semiconductor research is the single most advanced "project" that humanity has advanced to. What a time to be alive!
my biology teacher colleague is convinced it's tech transferred to us from the Roswell Incident xD
I know some of those words
@@jonathanlarsen4177 It's ALIEN 👽😎
@@cbrtdgh4210 Because space aliens always keep an ultraviolet lithography machine packed away in their flying saucer, because it's just handy to have one around.
Few people appreciate the extreme amount of engineering breakthroughs to make EUV happen. To the average person '10nm DUV' doesn't sound that different from '5nm EUV', but the leap from DUV to EUV is like from steam ships to nuclear aircraft carriers.
NO.
pretty much. Going from 193 nm laser to 13nm wavelengths. Everything needs to be more than 15x as precise. It also takes the number of masks needed to produce a chip down from over 250 to under 70.
And IBM has recently made a 2nm chip prototype
@@alanmay7929 Yeah, they are doing part of the research for partners like Samsung and Intel. ASML is already shipping machines that are theoretically capable of 2 and 3 nm, but it takes years of research from the foundries to actually get the defects down enough to mass produce.
Seems like 3nm is coming in 2025 and Intel will be the first customer to receive High-NA-EUV machines :)
@@M.V.P. Actually the node sizes companies like Intel and Apple are using (2 or 3 nanometer or whatever) are just marketing terms. Current EUV machines have a critical size larger than these nodes.
I am a material scientist and I'have been studying cutting-edge technologies for the past years but I have to say this: holy shit. The level of complexity of these machines is just superior!!
Im an Engineer, who is working on these machines at ZEISS and i have to say, i have learned a lot from your video. Great research & great video. I will forward it to my coworkers!
As someone who is pursuing a doctorate in a relating field right now, I just have to say how well researched and explained this video (as well as your Zeiss one) is. You really are talented in getting across a lot of very difficult to understand information to a wide audience. I will happily watch more of your content. Keep it up!
I'm not at liberty to say what, and what not, you got spot on but it's close enough. I've worked exclusively on EUV development for the past 20 years. When people ask what it is I do (as a job) it's almost impossible to adequately explain. Now I can just send them a hyperlink. Thanks for posting!
Just tell them you make magic haha that's literally what it is , it is a symphony of parts coming together to create a laser light here on earth.
@@ALD_02he's talking about this video
@ALD_02 you press ALT+D and then CTRL+C and you got the link (at least in some browsers (with English UI)).
It's the fckn link to this very video....
Zeiss is a two-time Oscar winner in the field of technology (lenses). The first camera on the moon had a Zeiss lens and the Lord of the Rings trilogy was shot with Zeiss lenses.
The technological development of optics is arguably the greatest achievement of the last 500 years. Think Galileos telescope and Newtonian reflector. Nothing but respect for the engineers involved in this sort of thing.
Respect for your presentation. I work at Zeiss SMT on development of EUV systems and have to say you did great research. Love to watch your other videos...
Me tooo … Good Video But only a scratch 😲 at the surface 😜
Oberkochen, Jena or Wetzlar? As I dive deeper into the topic of what „we“ actually do, I get more and more excited about my job. Just started a few months ago from the aerospace industry. And yes, compared to now it’s kindergarten games
As a client of Carl Zeiss I must say all their products are great! Their wet lens wipes are great!!!
Jokes apart, it's indeed an impressive company - my dad still has a late 1950s East Germany 35mm camera. The German company - like many other large companies in Germany - does not trade its stocks that are all under the control of the Carl Zeiss Foundation. That aspect of many German companies allows them to go in longer tem planning since they do not need to worry about maintaning profits for every trimester.
DUDE DUDE DUDE!!!!
Just found your channel.
I’m a huge laser, photonics, and optics geek. Spent all my spare money over the past few years building an optics test bed and laser breadboard in the corner of my electronics lab.
Just a mini photonics lab, with a bit of metrology & microscopy mixed in when I can afford it.
thank God for cheap components available on The second hand market these days! Pennies on the dollar for new or decommissioned professional level equipment from manufacturing, medical, and government industries!!! Some scary shit pops up for sale from time to time actually.
Love your content! Keep it up! we need stuff like this!😁
Where would you even get such equipment?
The engineering of this at scale is rad.
Let's keep pushing to get computronium!
Let's just build our own universe that we can physically travel to while we're at it!
That Zeiss imaging is so crazy complex, it is amazing it works at all! I really appreciate you explaining these amazing machines. Thanks & Good Luck!
My fellow software engineers cry about how difficult software engineering is. Compared to EUV engineering, software engineering is child play (including recent breakthroughs in ML). It's truly mind boggling. Humans are awesome.
Easily the best documentary about the subject! Superb work.
We're really pushing the boundaries for what can be done. I wonder when technologies get so advanced that human ability to manage project complexity becomes the limiting factor.
Did someone say ITER?
it's actually always a faktor. But with better technology, there comes better tools which can be used to overcome this problems again.
I'm optimistic. I don't think we're anywhere near the limiting factor of project complexity. 🙂
Don't think I've got the IQ points to process this video... how insanely clever are the people behind this tech
As an ASML employee I can say this was a good video
I appreciate how you explain technical stuff in layman's terms.
What about IMEC? The “tiny” Belgian research center that is a key player in developing semiconductor technology and applications.
This is just amazing! These companies deserve every penny they get.
As an aside, I have had ASML stock since I think 1998. Somehow, intuitively, I thought that was a very good company. Maybe because, as a Dutchman, I knew about Philips natlab, and all the innovations that came from it. I'm glad that over 20 years later I still have ASML stock.
Mind = Blown!
Semiconductor industry is highly underrated. Software companies are nothing comparing to this.
I wish carl zeiss gets listed in American stock exchange. I would bet all my money in asml and carl zeiss
Zeiss AG isn't listed anywhere.
Only their medical subsidiary is.
Zeiss AG is owned by Zeiss foundation. All the AG's profits go to the company as re-investment, to the Zeiss foundation, and the employees.
See:
en.wikipedia.org/wiki/Carl_Zeiss_AG
I didn't even know, that Zeiss still exists. Founded in 1846, everyone knew them to be amongst the best optics for rifles and binoculars. That they do this, is amazing!
They are very much alive. In the consumer market they are just "consultants" (e.g. to Sony) allowing their brand to be used. But whenever you need high high precision optics for something very special, from astronomy to medicine then Zeiss is sure to be involved.
You rarely come across them outside the science and high tech realm. But afaik they are still in the gun and military optics business as well.
These machines and optics are really among the most advanced 'mass produced' engineering feats humans have done so far, and they are producing the actual most advanced mass produced goods.
Let's just appreciate the staggering amount of innovation, engineering and production challenges overcome to produce this machine.
it really is amazing how much effort they have to put into these mirrors. I always wondered why they have to bounce it off so many mirrors instead of 3-4 (collector -> illuminator -> projector -> focusing). In all my reading I never found a clear answer.
I think it has something to do with constructive interference
Seems that the incidence angle of the EUV beam to the mirror surface need to stay in some range to maximize constructive interference, thus they cannot bend the beam too harshly, and they cannot build an infinitely large machine. So they have to use multiple mirrors to progressively shape the beam.
Yes, this is not intuitive. My guess ... take it with caution!... is as follows:
Bragg's reflection of a single beam ray from multiple layers of materials of different refractive indexes results in the lateral shift of the ray's shadows, which represent "reflections" from deeper layers.
The multiple mirrors arrangement may result in the compensation or attenuation of these "Bragg's shadows", and/or possibly? averaging nano-geometrical distortions in the system.
In general, “diving” into the science behind ellipsometry of thin optical layers could help better understand the intricacy of the whole design, ...which is a challenge in itself 😉!
Yes, this is not intuitive. My guess ... take it with caution!... is as follows:
Bragg's reflection of a single beam ray from multiple layers of materials of different refractive indexes results in the lateral shift of the ray's shadows, which represent "reflections" from deeper layers.
The multiple mirrors arrangement may result in the compensation or attenuation of these "Bragg's shadows", and/or possibly? averaging nano-geometrical distortions in the system.
In general, “diving” into the science behind ellipsometry of thin optical layers could help better understand the intricacy of the whole design, ...which is a challenge in itself 😉!
@@joshuahuang5798 That makes sense.It looks like they progressively reduce the angle and as Michael mentioned the layers can cast shadows, which I have read before as well. My guess is they need to compensate for the shadows while maintaining other limits or setup the angle for a clear top down projection. I don't know if the error averaging is correct because a lot of errors multiply through reflections. Would love to learn more about this.
Holy COW! after watching this, and other videos that touch on what it takes to make a sophisticated, modern chip, it is utterly mind boggling! I get the impression that putting a man on the moon was child’s play in comparison to what it takes to design and build these incredibly sophisticated machines! I am utterly astounded by the level of physics and chemistry knowledge (and engineering) that it took to build these wonders of human ingenuity. I am truly in awe of the level of precision that it takes.
Great episode, John!
Thanks for fleshing out some of the details of these incredibly challenging optics.
That's really impressive stuff, it looks like building spaceships is kindergarten-level engineering in comparison ;-) Do you document the sources you use for your videos somewhere? That would be pretty nice to dig deeper into a subject taking advantage of your great efforts to get an overview on the subject at hand.
Subscribe to his news letter. The newsletters go into much greater detail.
I was going to jokingly recommend this as well
@@Leopardosx But no sources cited there either...
Tell me that building the JWST beryllium mirrors is "Kindergarten level".
Complete with focusing electronics that work at 5 Kelvin.
@@stuartgray5877 you are describing optics here, not the spaceship which is used to move it. Those are basicly maximum optimized rockets. While definitely not without a challenge, I think most of the parts can be fabricated from sheet metals and tubes. The EUV functional parts cannot even be normally polished and must be polished using an ion beam under vacuum. I think controlling those processes to such a low failure rate is indeed vastly more complicated especially for such large surfaces
Excellent summation. Thank you.
Just blew my mind. Thank you for making it.
Thank you for bringing a more simple and clear explanation of how these UV Lithography works. Greetings from Kaohsiung!
Brilliant, again. This channel is a gem, much thanks.
It is beyond superlatives, for the reason that it embodies the core principles of what optics and lensing is in the holistic holographic context.
Brilliant review and presentation, thank you.
The memes really help with the explanation 🤣
This Video was awesome thank you for posting. As someone who works in the optics field its really great to see a youtuber putting in the research and detail. I also love your channel so i was excited to see this update. Thanks
Thank you for your deep research and thorough explanations of the processes involved
Excellent video on these processes , as always great content 👍
I have been in software for decades and have marveled all along at what must be going into the hardware. This explained it for me in sufficient detail, and I marveled all over again. So *thanks*!
Understood everything perfectly, thanks!
This explainer video is a *class of its own*. Thank you.
Wow I really love the in-depth videos, it’s truly amazing that these kind of machines does exists :) . Hope to hear even more about euv process maybe some more details about the new kind of masks used?
Simply amazing what ASML and Carl Zeiss have achieved! Incredible stuff!👍
I'm very grateful for your videos, this is so crazy even my friends flipped when i share this information. These videos explain so much of deep industry, Thanks!!
From a laymen’s perspective the chip in the machine I’m typing this on, had to be made by impossibly sophisticated machines, that required components that had to be made on impossibly sophisticated machines that required components that had to be made by impossibly sophisticated machines. Where does it end? The levels of precision are mind boggling to me, and this is merely a snapshot in time of our species’ technological development, what will the next cutting edge be? Truly impressive and somewhat disconcerting. Thank you for the view inside these profound precision machines.
Mind-blowing stuff. Great video.
An important additional point is that the plasma produces multiple wavelength of light, but the distributed bragg reflectors are very selective which wavelength they reflect - to the point that the angle changes the best reflected frequency. I suspect the multiple mirrors also to increase the purity of the light, at the cost of intensity.
Amazing video. Love your content.
The Tin vaporization process of EUV is so incredibly cool!
amazing job. well done research on this.
Great video as always, very interesting stuff. :)
I worked on the plasma source for my PhD while ASML were trying to realise this tech, amazing stuff and great to see a very well presented video on this. Working on soft X-ray tomography now with SiriusXT, I would love to hear your take on it as this new disruptive technology ramps up.
Great job as always!!
why this video still doesn't have at least 1mln views ? because understanding it only for legends. Great to see you here, legends.
amazing, great info about this technology
Very much technical and indetailed explanation about Zeiss Multi layer optics systems...as a non technical guy i was also able to understand few things....
thank you so much Asianometry.
Love to see a mention of MeRiT. I'm working on it's software for years and started on the first AFM.
AFMs are fun. They can even push and pick up particles. They even make a tool for it, the PRT.
And yes, most people working there have Dr. in front of their names. Generally super smart and nice people.
just absolute amazing video
Economics + science video, really thanks for your efforts.
50 pm, thats roughly 1/3 or 1/2 the diameter of a molybdenum or silicon atom respectively. so every single atom has to be spot on on its designated position on the mirror 50 cm diameter.
thats far bejond my comprehension I've to admit, absolutely mindbogling!
This was FASCINATING
Truly exquisite equipments
Outstanding content.
The reason ELLIPSOIDS vs PARABOLIC shapes (or paraboloid) are used is because parabolic reflectors reflect light from the FOCI parallel to an imaginary line defined by that foci and the parabola's asymptote / apogee. That's to say, rays reflected will be parallel that line (along with diverging rays. An ELLIPSOID however, allows focusing reflections at the other focus.
Single-reflection rays (photons) emanating from one of an ellipse's two foci will be focused (converged) at the other foci ... which I'd presume to be the wafer / mask, etc., in this case.
When you said "multilayer mirrors" I could see this professor of mine, quite a funny person, explainig them!
When I started working at ASML a decade ago Wikipedia said EUV lithography was impossible.
Yes wikipedia can be questionable at times but still that makes me smile.
Just pray that this statement never makes in into the Warhammer 40k space orks' version of Wikipedia.
I haven't seen chemistry cat memes since ten years ago. At this rate you are showing your age so much that you are going to be featured in your own videos one day.
Wow!!
Looking forward to videos about applied materials, Lam research and KLA..
Cheers mate
Underrated channel!!!
This is really amazing
These machines are the absolute pinnacle of human technology. They sound impossible to build and even fathom. That's why we need science. Science leads you to discoveries that make the "impossible" achievable. Giants standing on the shoulders of giants.
It is really kinda magic. Really astonishing tec
omg, this is awesome. I'm not sure where Zeiss' work ends and ASML's starts, but that's not important. Maybe there's no strict delineation. Nevertheless, we must go deeper! Idea: mask making industry?
There must definitively be a clear and very well defined interface, otherwise you'd never get a working system. Typically you can expect strict specifications and acceptance testing of each unit.
@@Martinit0 I guess Zeiss gets the specification of where the light has to go and what it has to look like, they of course manufacture the maintenance and customisation system as well. The whole lithography machine has more parts than just the illumination though.
ASML is like apple and Zeiss and others are like Pegatron and Foxconn
@@suntzu1409 So Zeiss basically makes everything?
@@andro7862 not everything just the optics
But my point is ASML does not actually make anything like apple
These videos on lithography are truly mind blowing for an everyday guy like me.
The intricacy and detail of these machines and the level of science and engineering you explain is like a whole new world.
And I'm really interested in this Ball of tin that gets shot by a lazer. Is the frequency really 50000 times per second?
The wavelength is not solely 13.5 nm but covers 13.2-13.8 nm. There is also some DUV light which they have spent much trying to eliminate.
Your videos are the best presentations of technology. I wonder if an alternate design approach is easier to achieve EUV lithography for small diameter wafers by use of small deflection mirrors where XRays or EUV graze off the surface. Also, instead of a pulse of EUV over the whole wafer, if it were designed as a stepper process where a column of ICs are exposed at a time.
simply incredible
Dude… you are seriously good/ intelligent…. Holly crap.. Good for you mate!
Great video
This is a spectacular video and the memes in between did u make them also ? Anyway the video was amazing cheers !!
Even with the USA comparison I can't understand how flat these mirrors are. Amazing, thank you for the great video.
The extreme advanced level of these machines is beyond comprehension.
You should put the link of previous related video on the description to let audian easy to follow. Thanks
This is real insane engineering.
Your channel is one of the main reasons I have RUclips Premium....Thanks!
Somehow your voice sounds like the late Grant Imahara (a.o. known from Mythbusters) and
I visualize him speaking in the mike.
Keep up your excellent explanations. Greeting from The Netherlands (aka Holland)
Hey John. Great video. I'm curious what shares in ASML would cost. Seems like a great investment. Also I would love to see you do an article on adaptive optics in astronomy. It seems like pretty well guarded technology as I only find block diagrams when I look it up. I am an amateur astrophotographer and I'd love to develop a cheaper adaptive optics system for amateurs that works the same way as professional adaptive optics. I study lens and mirror design a lot and Carl Zeiss is always mentioned.
Great exposition as always. Just want to add some physics-related corrections. Bragg reflection needs many layers not because one layer reflects not enough light. Indeed, one layer reflects pretty much nothing. Many layers are needed to produce coherent superposition of scattered waves in such a way that much is reflected and little is transmitted. It's pretty much the opposite to the photographic lens coating which is also multilayer these days. Second, the flare "much loved by J J Abrams" is in fact due to the use of anamorphic (cylindrical rather than spherical) lenses for wide-screen film photography. On the other hand, rms of mirror/lens surface leads to imperfect focusing which pretty much looks like your 5nm machine has resolution close to say a 10nm one. Having said that, I truly admire your dedication: I would never in my life want to sift through dozens of conference papers on the topic. Thanks again!
Again awesome research! Can you do research into Physik Instrumente who I believe makes all the small motors for continually adjusting the mirrors and stages for the reticle and wafer?
You got me subscribed with picometers.
This is cutting edge and I still can't accept Intel "intentionally" got themselves behind on technology or buying few ASML equipment or have not considered the foundry strategy back then. Current Intel CEO though will be first to get the High NA EUV equipment
@@user-jp1qt8ut3s chip production from 2025
It was because one guy wanted to be CEO so he deliberately lied about their progress instead of fixing it.
Even if they deliberately decided to not use 1st generation EUV machines, it is totally understandable given the complexity of EUV Machines
@@user-jp1qt8ut3s yeah its in development
It seems Intel bought ASML NXE:3350B EUV systems in 2015, apparently buying 15 of them. So they own the equipment, they just can't make them work effectively to make their chips. Don't know why.
Pretty impressive.
well done