Ellipsometry & CompleteEase Part 2 - Transparent polymers

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  • Опубликовано: 6 фев 2025
  • Here we'll look at an example of parylene on silicon as well as S1805 photoresist on tungsten. We employ the Cauchy function with some other details such as depolarization and anisotropy. This may prove useful if you are interested in mapping spun resists on wafers to see how uniform the coating is.
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    Disclaimer: This video is intended to serve as supplemental information and cannot replace in-person instrument training. Caltech and KNI are not responsible for how the presented information is translated for use in other facilities.
    For information or questions about this video, contact kni@caltech.edu
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