Great explanation and presentation. I have a small question, As you mentioned about coating imperfections like comets, streaks and non - uniformity etc; what are the different ways to visually inspect the wafer as the coating resin is clear liquid it will be really hard to differentiate before and after coating? how can we visually inspect the failure modes of coating? If you could answer that would be greatly appreciated. Thanks
Thank you for the video 1.Does anyone know why SiOH is hydrophillic and SiH is Hydrophobic?? 2.and do we make the surface hydrophillic because hdms is also hydrophillic?
Lihography is such an interesting topic!
Great explanation and presentation. I have a small question,
As you mentioned about coating imperfections like comets, streaks and non - uniformity etc; what are the different ways to visually inspect the wafer as the coating resin is clear liquid it will be really hard to differentiate before and after coating? how can we visually inspect the failure modes of coating? If you could answer that would be greatly appreciated.
Thanks
VERY GOOD
Thank you for the video
1.Does anyone know why SiOH is hydrophillic and SiH is Hydrophobic??
2.and do we make the surface hydrophillic because hdms is also hydrophillic?