DTU Nanolab
DTU Nanolab
  • Видео 103
  • Просмотров 219 555
Lithography tool package training 6 – Post-lithography steps
In this video we will look into some of the things that may take place after the lithography process is finished. In the context of photolithography, this is usually after the development step.
Topics in lecture video:
• De-scumming
• Hardbake
• Resist stripping
• Pattern transfer
• Sample inspection
Просмотров: 201

Видео

Lithography tool package training 5 - Resist, substrates, and pre-treatment
Просмотров 1572 месяца назад
In this video we deepen our understanding of the photoresists and substrates we can use. We also look into some of the pre-processing methods used for improving wetting and adhesion. Topics in lecture video: • Photoresist • Substrates • Pre-treatment
Lithography tool package training 4 - Development
Просмотров 1462 месяца назад
The third step in photolithography is to develop the exposed resist. The development will remove parts of the resist, revealing the mask pattern in the resist. Topics in lecture video: • Development principle • Development methods • Developer chemistry
Lithography tool package training 3 - Exposure
Просмотров 1882 месяца назад
The second step in photolithography is to expose the resist film, in order to transfer a mask pattern into the resist. Topics in lecture video: • Exposure principle • Spectral sensitivity • Exposure dose • Exposure hardware • Common problems
Lithography tool package training 2 - Coating
Просмотров 1872 месяца назад
The first step in photolithography is to apply a photosensitive coating, known as a resist, to the substrate. Topics in lecture video: • Spin coating principle • Resist composition • Spin coating phases • Spin curve • Soft baking • Cooling • Common coating problems • Edge bead
Lithography tool package training 1 - Introduction
Просмотров 2332 месяца назад
Introduction to photolithography for cleanroom semiconductor fabrication. Topics in lecture video: • What is photolithography • Basic process steps • Common tools and parameters
CleWin 5 introduction
Просмотров 2654 месяца назад
A short introduction to the CleWin 5 mask layout software
Working with chemicals in the cleanroom in building 346
Просмотров 4254 месяца назад
Introduction to safety when working with chemicals in the cleanroom in building 346 at DTU Nanolab
Cleanroom safety building 346
Просмотров 4474 месяца назад
Introduction to safety at DTU Nanolab - a short description of how the cleanroom works and the safety issues you will meet.
Dry Etch TPT Lecture - 6 Equipment for dry etching at Nanolab
Просмотров 7185 месяцев назад
In this video we give you an overview of the dry etch equipment we have here at DTU Nanolab. The overview is given in LabAdviser where you can always take a look at the updated version - if you have access to LabAdviser.
Dry Etch TPT Lecture - 5b Chamber conditioning and RF matching
Просмотров 8805 месяцев назад
In this video we describe the importance of chamber conditioning and the importance of good RF matching.
Dry Etch TPT Lecture - 5 Process tuning - process parameters
Просмотров 1,2 тыс.5 месяцев назад
In this video we discuss the different equipment settings like chamber pressure, power to the plasma, gas flows and temperature and how they influence the etch characteristics.
Dry Etch TPT Lecture - 4 Etch Characteristics
Просмотров 1,3 тыс.5 месяцев назад
In this video some of the etch characteristics is discussed - that is, the result of the etching on the sample being etched. We look at the etch rate uniformity over the sample with respect to structure sizes and etch loading area. We also look at different etching profiles and discuss etch selectivity between different materials.
Dry Etch TPT Lecture - 3b The Bosch process
Просмотров 1,5 тыс.5 месяцев назад
In this video an etch mechanism called the Bosch process is explain in details. This is a passivation mechanism that is very important in silicon etching, especially deep silicon etching.
Dry Etch TPT Lecture - 3 Etch Mechanisms
Просмотров 1,3 тыс.5 месяцев назад
This video explains the etch mechanisms in plasma etching/reactive ion etching. First the chemical etch mechanism is explained and how to select the process gas(es). Then the physical and reactive ion mechanisms are explained and the role of the ions in these mechanisms. At last an introduction to the passivation mechanisms is given.
Dry Etch TPT Lecture - 1 Motivation
Просмотров 1,2 тыс.5 месяцев назад
Dry Etch TPT Lecture - 1 Motivation
Dry Etch TPT Lecture - 2 Etch plasma and equipment layout
Просмотров 1,2 тыс.5 месяцев назад
Dry Etch TPT Lecture - 2 Etch plasma and equipment layout
Dry Etch TPT Lecture - 0 Introduction to Dry Etch Equipment
Просмотров 2,5 тыс.5 месяцев назад
Dry Etch TPT Lecture - 0 Introduction to Dry Etch Equipment
Dry Etch TPT Training - ASE and AOE software: #4 The Bosch process
Просмотров 4095 месяцев назад
Dry Etch TPT Training - ASE and AOE software: #4 The Bosch process
Dry Etch TPT Training - ASE and AOE software: #7 Process log
Просмотров 3375 месяцев назад
Dry Etch TPT Training - ASE and AOE software: #7 Process log
Dry Etch TPT Training - ASE and AOE software: #6 Removing a wafer from the load lock
Просмотров 3325 месяцев назад
Dry Etch TPT Training - ASE and AOE software: #6 Removing a wafer from the load lock
Dry Etch TPT Training - ASE and AOE software: #5 Run a process
Просмотров 4025 месяцев назад
Dry Etch TPT Training - ASE and AOE software: #5 Run a process
Dry Etch TPT Training - ASE and AOE software: #3 Recipe editor
Просмотров 4595 месяцев назад
Dry Etch TPT Training - ASE and AOE software: #3 Recipe editor
Dry Etch TPT Training - ASE and AOE software: #2 Load and transfer
Просмотров 4585 месяцев назад
Dry Etch TPT Training - ASE and AOE software: #2 Load and transfer
Dry Etch TPT Training - ASE and AOE software: #1 intro
Просмотров 5835 месяцев назад
Dry Etch TPT Training - ASE and AOE software: #1 intro
Dry Etch TPT Training - ICP’s and Pegasus software: #5 Automatic processing at the DRIE-Pegasus
Просмотров 3755 месяцев назад
Dry Etch TPT Training - ICP’s and Pegasus software: #5 Automatic processing at the DRIE-Pegasus
Dry Etch TPT Training - ICP’s and Pegasus software: #1 Overview
Просмотров 5555 месяцев назад
Dry Etch TPT Training - ICP’s and Pegasus software: #1 Overview
Dry Etch TPT Training - ICP’s and Pegasus software: #2 Recipes
Просмотров 4925 месяцев назад
Dry Etch TPT Training - ICP’s and Pegasus software: #2 Recipes
Dry Etch TPT Training - ICP’s and Pegasus software: #3 Running processes
Просмотров 4255 месяцев назад
Dry Etch TPT Training - ICP’s and Pegasus software: #3 Running processes
Dry Etch TPT Training Introduction to wafer loading and temperature controller
Просмотров 1,3 тыс.5 месяцев назад
Dry Etch TPT Training Introduction to wafer loading and temperature controller

Комментарии

  • @mariaa.2240
    @mariaa.2240 3 месяца назад

    Thank you very much for these lectures! I am a PhD student and working in clean room. This is so much valuable! 😊

  • @leciacburle6333
    @leciacburle6333 4 месяца назад

    Hi, thank you very much for the nice video. Is there a way to store also the U,V (or X,Y) position of the picture in the image, for example in the title?

  • @jiggysiggy
    @jiggysiggy 4 месяца назад

    so good

  • @Rocky-kf2mh
    @Rocky-kf2mh 5 месяцев назад

    Great explanation and presentation. I have a small question, As you mentioned about coating imperfections like comets, streaks and non - uniformity etc; what are the different ways to visually inspect the wafer as the coating resin is clear liquid it will be really hard to differentiate before and after coating? how can we visually inspect the failure modes of coating? If you could answer that would be greatly appreciated. Thanks

  • @sushilkumar-gk6xw
    @sushilkumar-gk6xw 11 месяцев назад

    thanks a lot for a detailed explanation sir.

  • @LeNiu-nn2hm
    @LeNiu-nn2hm 11 месяцев назад

    very helpful!

  • @prashantbisht6384
    @prashantbisht6384 Год назад

    Its a piece of beauty 😅

  • @prashantbisht6384
    @prashantbisht6384 Год назад

    Nice video 😊

  • @filiptopic3721
    @filiptopic3721 Год назад

    Hi, and thank you for making your safety videos available to the public - these are a fantastic resource! I wanted to ask about the gloves you use, are they the North Silver Shield ones and how do you ensure the cleanroom compatibility, do you pre-clean them or can you use them as provided by your vendor?

  • @KawdoruTaon
    @KawdoruTaon Год назад

    This woman should be a professional tutorial maker. All her videos are very well explained.

  • @codenamehalf8326
    @codenamehalf8326 Год назад

    Lihography is such an interesting topic!

  • @aurobindadash4549
    @aurobindadash4549 Год назад

    How to unlock the data zone? Because in our system right click of mouse is not working in the process you discussed.

  • @chiragsharma5050
    @chiragsharma5050 Год назад

    I fall in love with this lab

  • @dr.nooralihasan6944
    @dr.nooralihasan6944 Год назад

    That was kind of you to record this video, It is very helpful. thanks a lot.🌹

  • @allresearchmahuva2440
    @allresearchmahuva2440 2 года назад

    good new plant in india best reseach

  • @NawaDay-gb6dq
    @NawaDay-gb6dq 2 года назад

    thanks for knowledge sharing.

  • @devinnemusemeche1273
    @devinnemusemeche1273 2 года назад

    😉 ≋p≋r≋o≋m≋o≋s≋m

  • @CrocoduckRex
    @CrocoduckRex 2 года назад

    Very helpful and concise. Thank you very much!

  • @bhadrame3755
    @bhadrame3755 2 года назад

    Thnks

  • @bonaggi
    @bonaggi 2 года назад

    Great video!

  • @geribbtes
    @geribbtes 3 года назад

    Thanks for the heads-up! Next time, please more fancy animations :-)

  • @renjugaetec
    @renjugaetec 3 года назад

    Very nice presentation

  • @zlli6278
    @zlli6278 3 года назад

    many thanks !

  • @ywk7282
    @ywk7282 3 года назад

    Thank you for the video I have a few questions. 1. I am wondering what exactly bleaching is? Is it a diffusion? 2. I am wondering what polarity change would do to allow to make pr 3. What does dose mean in 13:12? Dose is said throughout the lecture but I dont understand the exact meaning Thanks again for the lecture

  • @ywk7282
    @ywk7282 3 года назад

    Thank you for the video 1.Does anyone know why SiOH is hydrophillic and SiH is Hydrophobic?? 2.and do we make the surface hydrophillic because hdms is also hydrophillic?

  • @markkraman886
    @markkraman886 3 года назад

    This series of videos was really helpful, thanks a lot.

  • @alexanderwildish9483
    @alexanderwildish9483 3 года назад

    Really helpful - very clear

  • @epowersofttechnology1549
    @epowersofttechnology1549 4 года назад

    VERY GOOD

  • @cronopio12345
    @cronopio12345 4 года назад

    Good lecture, thanks!

  • @ariadrou87
    @ariadrou87 4 года назад

    Really helpful for refreshing our memories. Mange tak!

  • @رائدابوزيد-ع3خ
    @رائدابوزيد-ع3خ 4 года назад

    very good presentation, can I know the name of the chemicals storage between the hoods and beside the shower???

    • @clausnielsen4903
      @clausnielsen4903 4 года назад

      The chemical storage cabinets were custom made by the manufacturer of the fume hoods. It’s a German manufacturer called Arias. You can contact them at arias.de

    • @رائدابوزيد-ع3خ
      @رائدابوزيد-ع3خ 4 года назад

      @@clausnielsen4903 thank you

  • @jinhoyun6891
    @jinhoyun6891 4 года назад

    Hello, I am BRS TECHNOLOGY, a semiconductor company in Korea. I would like to know if you have DAD-321 and do you sell it. My email address is brsjh@brstech.co.kr

  • @xavcfh4253
    @xavcfh4253 4 года назад

    Well done! I use this saw every day. Signed : a french from hell.

  • @TukerBiel
    @TukerBiel 5 лет назад

    What the difference between take a picture with pixel avg, line avg and continous avg?

  • @TukerBiel
    @TukerBiel 5 лет назад

    The aperture align and stigmation correction is always do in Pixel Avg?

  • @MerrittOutdoor
    @MerrittOutdoor 5 лет назад

    The plant I work at has 40000 gallons of it

    • @RoMan-lf8tc
      @RoMan-lf8tc 3 года назад

      that stuff almost killed me, some bozo plant engineer connected a heated wet bench with 4% TMAH to a heat exhaust system, I got a lung full of vapor, ended up in the emergency room 3 days later, bp 188/118 at 130 bpm took 3 days to manifest, a little more and i would have had a heart attack, I`m lucky to be alive, do not underestimate the danger of this substance

    • @MerrittOutdoor
      @MerrittOutdoor 3 года назад

      What plant were you at ?

    • @MerrittOutdoor
      @MerrittOutdoor 3 года назад

      @@RoMan-lf8tc what plant was you working at ?

    • @RoMan-lf8tc
      @RoMan-lf8tc 3 года назад

      @@MerrittOutdoor semiconductor plant in Palm Bay Florida

    • @MerrittOutdoor
      @MerrittOutdoor 3 года назад

      @@RoMan-lf8tc I worked around it at a Basf chemical plant

  • @douro20
    @douro20 5 лет назад

    Are they required to have remote lockouts?

  • @grahamchadwick5242
    @grahamchadwick5242 5 лет назад

    where's your mask buddy?

  • @arnabkemi
    @arnabkemi 5 лет назад

    Very helpful!

  • @jhyland87
    @jhyland87 5 лет назад

    Where's part 3?

  • @MeysamAkhtar
    @MeysamAkhtar 6 лет назад

    Great tutorial videos. Thanks for uploading.

  • @allenzha7556
    @allenzha7556 6 лет назад

    Nice Video, thanks !