Intrinsic Diffusivities of B, P and As in Si
HTML-код
- Опубликовано: 8 окт 2009
- A presentation entitled "Accurate Determination of the Intrinsic Diffusivities of Boron, Phosphorus and Arsenic in Silicon: The Influence of SiO2 Films" by Yoko Kawamura from the Graduate School of Science and Technology at Keio University.
Наука
