How Extreme Ultraviolet Lithography works | Part 3/3

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  • Опубликовано: 24 дек 2024

Комментарии • 27

  • @SuperHemi2006
    @SuperHemi2006 Год назад +1

    What is fascinating- that even at ZEISS ideas from all over the world from different people have been adopted to build such a great product as EUV.

  • @michaelmeichtry316
    @michaelmeichtry316 3 года назад +6

    Excellent series explaining the history and technology requirements of EUV systems! The series also highlights how the development of EUV technology over the past three decades has been a global endeavor, including government research labs, private companies such as Zeiss, along with other institutions. Thank you for making this video series available.

  • @alexandersundukov3196
    @alexandersundukov3196 4 года назад +13

    01:35 Requirement for the Repeatability of the Measurement
    06:27 Surface Deviation
    07:02 Analogy
    07:20 Si/Mo Coating
    07:49 Reflectance Curve
    08:22 EUV Reflectance vs DUV Transmission
    11:15 Barrier Layer
    13:47 Mirror Positioning

    • @tonylorenzano1830
      @tonylorenzano1830 3 года назад

      If you say so...I was just waiting for the break to get some popcorn.

    • @mz7315
      @mz7315 Год назад

      @@tonylorenzano1830 HA!

  • @graemeroberts2935
    @graemeroberts2935 3 года назад +7

    The entire series is so well done! Thank you, Dr. Migura.

  • @pjoh7
    @pjoh7 4 года назад +27

    Great video series! It would be great to learn more about the manufacturing techniques used for achieving picometer-scale roughness on the reflective optics. Zeiss and ASML are truly a powerhouse in enabling Moore's law to continue!

    • @tonylorenzano1830
      @tonylorenzano1830 3 года назад +1

      Dr. Moore says that it isn't really continuing, though it has been driving the industry on. It's a Law which is now, "long in the tooth". And it was based on $30 transistor costs, in the 1960s, which was actually closer to $8 or less costs. [That's more than I payed for my first one in about 1965, and they plummeted after that.] That kind of growth driving the world society is unsustainable at this juncture.
      [The Pentagon just announced that UFOs, (AFPs) flying at13,000 mph capable of turning at a g-force of 70 exist! (60 Minutes TV as well). I wonder what Dr. Moore, worth $13 billion at 92, will say to his law in 10 years. All bets are off, I would think. New game.]
      Nice video.

  • @tigertiger1699
    @tigertiger1699 Год назад +1

    Excellent video.., well beyond my comprehension 🙏🙏🙏🙏

  • @rymes8497
    @rymes8497 2 года назад +1

    I'm proud to do my Part in this

  • @evilMANGO-ec7mx
    @evilMANGO-ec7mx 4 года назад +3

    These were very interesting videos, so many new pieces of information!

  • @mkdmitry
    @mkdmitry 2 года назад +1

    Nice, please post more series!

  • @007thsensesmshendokar7
    @007thsensesmshendokar7 3 года назад +7

    Dr. Sascha Migura, Appreciate your efforts to present a rudimentary of Highly Complex EUV system in a Lucid and uncluttered manner. Very Informative and Crisp Lecture Series.

  • @jatigre1
    @jatigre1 7 месяцев назад

    I wonder what would happen if Zeiss decided to rotate a Michelson Morley interferometer vertically.

  • @vasuntontony3315
    @vasuntontony3315 11 месяцев назад

    Maybe we can use the computer to control the light to carve

  • @tonylorenzano1830
    @tonylorenzano1830 3 года назад

    Well, I loved it, but how long before you exceed the Ultraviolet and go to the next level radiation [ which you are working on now]? And what of the two "complainers" of this video above??

    • @zeissgroup
      @zeissgroup  3 года назад +4

      Hello Tony, ZEISS is already working with its partners on the next EUV generation. This will be launched on the market in the next few years and will enable even smaller, more powerful and more energy-efficient microchips than ever before.

    • @tonylorenzano1830
      @tonylorenzano1830 3 года назад

      @@zeissgroup Thank you! Loved the video!

    • @pavelnikulin8240
      @pavelnikulin8240 3 года назад

      xray litho is ded in the water because stray electrons limit its resolution to the same as EUV

  • @davidwilkie9551
    @davidwilkie9551 3 года назад

    Wow

  • @robertroberto4749
    @robertroberto4749 3 года назад +3

    Please, STOP! Chinese are looking your videos!!

    • @nickl5658
      @nickl5658 3 года назад +3

      Rudimentary information of this nature does not do anything. You might as well panic because the chinese are working on ion beam lithography.

    • @robertroberto4749
      @robertroberto4749 3 года назад +1

      @@nickl5658 Nick, are you member of CPC?

    • @Spextori
      @Spextori 2 года назад +1

      @@robertroberto4749 Hello, I'm a member of the CCP. After silicon-based chips will approach their physical limit in the future, we are investing heavely into next-generation carbon-based graphene chips to skip the lithography machine manufacturing process.

    • @robertroberto4749
      @robertroberto4749 2 года назад +2

      @@Spextori graphene chips are like FUSION ENERGY, QUANTUM COMPUTERS and ANTIGRAVITY, always 30 years in future, ha, ha, ha.

    • @hubertkaiser8581
      @hubertkaiser8581 2 года назад

      Robert, to late , Y saw all this. But dont worry, we make that different, without optics, only with laser from a laserpointer fore 1 Dollar.