Hi, Dr. Chris Mack, It is shown on page 10 that only waves of -1,0,1 can pass through the lens. Are all other frequencies blocked out? So not all the frequencies between these three diffraction order can pass through the lens, right? Why does the lens filter out the high spatial frequency? Is it cheaper or easy to build a lens because the lens uses a low spatial frequency system? Do we shrink the image by Fourier transform, and then restore it to its true state by Fourier transform again?
Of course, the best way to learn is by doing. If you have access to PROLITH, use it. But if you don't have access, there are a couple of possible things to do. I recommend my textbook Fundamental Principles of Optical Lithography, since the theory of lithography is the theory of PROLITH. Also, you can read some of my papers where I have used PROLITH to solve lithography problems. All of my papers are available here: www.lithoguru.com/scientist/papers.html.
PDF copies of all the slides in this course are available at:
www.lithoguru.com/scientist/CHE323/course.html
Hi, Dr. Chris Mack,
It is shown on page 10 that only waves of -1,0,1 can pass through the lens. Are all other frequencies blocked out? So not all the frequencies between these three diffraction order can pass through the lens, right? Why does the lens filter out the high spatial frequency?
Is it cheaper or easy to build a lens because the lens uses a low spatial frequency system?
Do we shrink the image by Fourier transform, and then restore it to its true state by Fourier transform again?
Very helpful and well explained, thank you so much sir!
Supper supper useful and helpful!!! Thank u Chis!!!
thanks a lot for such wonderful videos.
Dear Prof. Chris Mack, I would like to learn about PROLITH -Lithography Simulation, can you please guide me how I can learn it all by myself.
Of course, the best way to learn is by doing. If you have access to PROLITH, use it. But if you don't have access, there are a couple of possible things to do. I recommend my textbook Fundamental Principles of Optical Lithography, since the theory of lithography is the theory of PROLITH. Also, you can read some of my papers where I have used PROLITH to solve lithography problems. All of my papers are available here: www.lithoguru.com/scientist/papers.html.
@@ChrisMack Thank you professor for the information.
Is the notes or PPT for this lecture available ?
PDF copies of all the slides in this course are available at:
www.lithoguru.com/scientist/CHE323/course.html