I've known about this technique for years and thought about why no prototyping companies haven't just made something using it available for small projects, maskless, fast turn-around from design to real things. obviously not good for large volume production, but for prototype silicon, it just seems perfect.
This process is how the masks are made to begin with and it's the reason why they are so expensive. It takes approximately forever to draw out billions of transistors.
That turned out much better than my first attempt at e-beam lithography -- and I was on a tool with commercial EBL hardware! You mention "special" e-beam resists, but what works best in my experience is PMMA. If you get a chance, try that out. Awesome project!
I assume the PMMA crosslinks when exposed, since it is a positive tone resist. Interestingly, I've heard that PMMA can turn into a negative resist when over exposed, though I'm not sure why.
Thanks for posting this! I am working on a planetarium projector with aluminized glass plates for the star masks. I am trying to get pinhole sizes down to 1 micron or finer.
That acetone developing makes kinda sense, assuming resist you used is phenol based, either light or high heat should cause resist to crosslink and possibly be completely resistant to solvents like acetone. Perhaps if you run beam over wafer twice or so it may give you more leeway for developing time Edit: I commented too early as usual :P what happened there is obviously not what I described.. but interesting nontheless
It's so sad to see good equipment get scrapped because it's not the latest and greatest, nice to see someone making good uses of it, and even taking it beyond original capabilities👍
Very cool! Due to chronic illness I have had to retire from work, and have started to do hobby electronics at home, but damn! You really look like your having fun. Unfortunately for my old line of work, (high energy physics) the building of a particle accelerator in the basement is out of the question, where I live.
You might be surprised what you can find on Ebay. You should make one slowly and upload the videos for us to see. Who knows, the joy you might get from it could give you the strength to fight through your illness.
@@dreggory82 Thank you for your optimism, I will give it a thought, at the moment I am building a Spark Chamber, in the hope of detecting Cosmic Rays (Muons hopefully), so far I am only having luck, electrocuting myself (7.5kV), having to replace Helium that keeps leaking (Expencive and becoming harder to acquire) and detecting alpha particles from the decay of a sample of Americium-2 that I acquired from an older model smoke detector, here's hoping! Should I get the beast to work properly, I will consider making and posting a video. Thanks again for the encouragement.
@@dreggory82 The spark chamber has two plastic scintillation detectors, the Helium-Neon gas mixture is used to ionize, and make the spark path visible, creates a favourable path for the forthcoming spark. I can provide complete schematics and basic theory of design if you wish.
you could omit the beam blanker if you scanned the surface in a Z pattern. Edit: no wait, this is not a laser, you can't turn the beam off that's what the beam blanker is for, nevermind. :)
Could you please explain why companies like ASML use ur light instead of electron beams? Electronic microscopes is pretty old technology, and it's known that elections have much shorter wavelengh that any light
Does anyone know if Sam has talked about the overall cost of all tools needed to make chips in his garage? While it does seem possible for the average joe, it still seems extremely expensive to be able to do all of this... The average joe would have to save a lot of money (seemingly...correct me if I'm wrong)
Hardware hackers never buy stuff new. Also, one must understand the overall fundamental process of making said chips. I’m not talking about bleeding edge stuff. Once it’s understood, get the gear that has the possibility of being hacked.
Oh so this is how the masks are made... it is like the chicken egg problem, you would need masks to make the masks, but with this you do not need a mask, but it looks quite slow process
They do actually, but unfortunately all this fun stuff is for the graduate students, and usually you have to specialize in one area. The lab I was in (physics department) made electronic devices and tested them at millikelvin. There was a whole giant new building devoted to nanofab. They had a fancy electron microscope that also had a ion beam that could cut the samples and then scan the new surface. The downside: you had to be certified to use the nanofab, which required $10,000.00 that usually comes from your professors research budget. I tried, I was unable to get my professor's sponsorship.
Super cool Sam!
Hmmm, Ideas for next project ? ? ?
cool! I'll try this with my antiproton synchrotron beam when I get home.
Where did you get one of those?
@@mrdesmit6038 E-bay
lmfao
I've known about this technique for years and thought about why no prototyping companies haven't just made something using it available for small projects, maskless, fast turn-around from design to real things. obviously not good for large volume production, but for prototype silicon, it just seems perfect.
Yeah, it's certainly good for research.
you should hit ASML up with that idea here in the netherlands.
@@km5405 Mapper, a Dutch company developing these kinds of tools, was assimilated into ASML earlier this year
@@TheStormTalon dont you mean ASMiLated?
This process is how the masks are made to begin with and it's the reason why they are so expensive. It takes approximately forever to draw out billions of transistors.
That turned out much better than my first attempt at e-beam lithography -- and I was on a tool with commercial EBL hardware! You mention "special" e-beam resists, but what works best in my experience is PMMA. If you get a chance, try that out. Awesome project!
does PMMA croslink when exposed to electron beam?
I assume the PMMA crosslinks when exposed, since it is a positive tone resist. Interestingly, I've heard that PMMA can turn into a negative resist when over exposed, though I'm not sure why.
@@unclekyky I work with ebl systems, pmma cross-links with very large doses
Very cool, Sam. Love the BurrBrown DAC's :-)
The wiring on the back of the microscope is a thing of beauty!
These things are extream and deserve 1000000000x attention.
Incredibly impressive man! I can't believe how good of a job you are doing considering how complex lithography can be.
What is the overall size of the etch?
P.S. This is really cool.
small
5:38 Nice Irony. Thanks for sharing.
A tiny tile with Nasca figures and a lens would be neat
We need more of this stuff.
Mind blowing. Absolutely fantastic work.
Thanks for posting this! I am working on a planetarium projector with aluminized glass plates for the star masks. I am trying to get pinhole sizes down to 1 micron or finer.
That acetone developing makes kinda sense, assuming resist you used is phenol based, either light or high heat should cause resist to crosslink and possibly be completely resistant to solvents like acetone. Perhaps if you run beam over wafer twice or so it may give you more leeway for developing time
Edit: I commented too early as usual :P what happened there is obviously not what I described.. but interesting nontheless
It's so sad to see good equipment get scrapped because it's not the latest and greatest, nice to see someone making good uses of it, and even taking it beyond original capabilities👍
Wow! Good job! Last month, I learned about e-beam in my microfab class.
What line width did it produce?
You are a hero, I have been wanting to do this with my SEM too, but now I'm feeling more confident and inspired.
This is incredible, who the hell are you and how/why did you build this in your garage?
I wouldn’t mind having one of these setups. I’d be making chips.
Very cool! Due to chronic illness I have had to retire from work, and have started to do hobby electronics at home, but damn! You really look like your having fun. Unfortunately for my old line of work, (high energy physics) the building of a particle accelerator in the basement is out of the question, where I live.
You are a physicist?
You might be surprised what you can find on Ebay. You should make one slowly and upload the videos for us to see. Who knows, the joy you might get from it could give you the strength to fight through your illness.
@@dreggory82 Thank you for your optimism, I will give it a thought, at the moment I am building a Spark Chamber, in the hope of detecting Cosmic Rays (Muons hopefully), so far I am only having luck, electrocuting myself (7.5kV), having to replace Helium that keeps leaking (Expencive and becoming harder to acquire) and detecting alpha particles from the decay of a sample of Americium-2 that I acquired from an older model smoke detector, here's hoping! Should I get the beast to work properly, I will consider making and posting a video. Thanks again for the encouragement.
@@kitsouk1 I will subscribe in hopes. What are you using the helium for? Is it the sintillator medium?
@@dreggory82 The spark chamber has two plastic scintillation detectors, the Helium-Neon gas mixture is used to ionize, and make the spark path visible, creates a favourable path for the forthcoming spark. I can provide complete schematics and basic theory of design if you wish.
channel is very cool, hope your work is going well
do you know of any open source etch modeling/simulation software?
you could omit the beam blanker if you scanned the surface in a Z pattern.
Edit: no wait, this is not a laser, you can't turn the beam off that's what the beam blanker is for, nevermind. :)
You've earn yourself a subscriber my friend! Really fantastic work you're doing. Can't wait for more!
Really impressive. What is the estimated feature size on this?
Hello sam, nice job. I want to know the time consuming to lithography the pattern in your video.
Small resistor + capacitor to smooth out the transition?
I like the beam essentially being an antenna, an electron whisker.
Really wonderful to see a new video from you :)
+Kent VanderVelden thanks!
rather surprised at the quality of this, lack off dust and impurities even with out a clean room
I installed the Joe Nabity ebeam system with blanking plates on many SEMs, including a 6400 at UCSD.
So nice, where did you get the electron microscope ?
I think youtube algorithm is finally picking up this channel
WRT "beam blanker" - why don't they use gate grid, just like simple triode does ?
Could you please explain why companies like ASML use ur light instead of electron beams? Electronic microscopes is pretty old technology, and it's known that elections have much shorter wavelengh that any light
My dream have always been to visit a CPU manufacturer laboratory. This is amazing to see.
Sam is like Applied science 2 I like this channel.
Great video, very interesting
That kind of knowledge you will not find in university
Does anyone know if Sam has talked about the overall cost of all tools needed to make chips in his garage? While it does seem possible for the average joe, it still seems extremely expensive to be able to do all of this... The average joe would have to save a lot of money (seemingly...correct me if I'm wrong)
Hardware hackers never buy stuff new. Also, one must understand the overall fundamental process of making said chips. I’m not talking about bleeding edge stuff.
Once it’s understood, get the gear that has the possibility of being hacked.
You can write all great britanica encyclopedia series in a surface smaller than a finger tip. That's impressive.
This is FREAKING AWESOME!
Cool channel, but yet underrated. I subscribed.
how thin is the line your drawing with.
So do you believe anyone is constructing elements yet in a one atom at a time etch process
Absolutely fantastic !!!
Odd question but Sam how old are you???
love your channel, great content.
So this is why Mapper Lithography went bankrupt...
Wow, cool stuff!
hey it's like you're at my old work.
Excellent.
It is kinda reminds me how CRT works. But in finer details
Very interesting topic
Nice friend
Won't the e-beam make a bunch of x-rays?
Yeah, they do, AND, it takes even more space, a metal enclosure (to shield you from those x-rays), and, they are expensive.
wow , iam impressed! cool
Thats so cool
School?
So fing cool!
If you were a Dead Bear, which color would you be?
Amazing
Brilliant
Oh so this is how the masks are made... it is like the chicken egg problem, you would need masks to make the masks, but with this you do not need a mask, but it looks quite slow process
Ok, so it’s a slow process, who cares?
nice 👌
Awsome
Wow
You are millennial applied science.
Gen z baby
I don't get why do you go to school anymore, clearly they don't know 10% of what you're talking about.
They do actually, but unfortunately all this fun stuff is for the graduate students, and usually you have to specialize in one area. The lab I was in (physics department) made electronic devices and tested them at millikelvin. There was a whole giant new building devoted to nanofab. They had a fancy electron microscope that also had a ion beam that could cut the samples and then scan the new surface. The downside: you had to be certified to use the nanofab, which required $10,000.00 that usually comes from your professors research budget. I tried, I was unable to get my professor's sponsorship.
Amazing