Hello, thank you very much for the explanation!! I did nanoidentation on a same photoresist (CAR) with 3 different layer thicknesses (4.5um, 5.2um and 6.5um) with a penetration depth of 500nn. i'v come to the conclusion that when the thickness of the photo resist is bigger, then the foto resist is harder. Do you have an idea why?? Thank you very much!!!
Thank you so much for all the efforts you've done
Thank you 😍
Hello, thank you very much for the explanation!!
I did nanoidentation on a same photoresist (CAR) with 3 different layer thicknesses (4.5um, 5.2um and 6.5um) with a penetration depth of 500nn. i'v come to the conclusion that when the thickness of the photo resist is bigger, then the foto resist is harder. Do you have an idea why?? Thank you very much!!!