Видео

Ellipsometric data analysis can be difficult, especially for new users. Model Builder is a revolutionary new feature to automate the building and testing of analysis models.

A Film Sense FS-1EX Multi-Wavelength Ellipsometer was mounted on a Kurt J. Lesker ALD-150LX process chamber. In situ realtime monitoring of ALD deposition of Al2O3 was demonstrated. The Film Sense FS-API was used to integrate the Film Sense ellipsometer software with the Lesker eKLipse process control software. This enables a display of the ellipsometer thickness in the eKLipse software, which ...

Film Sense Multi-Wavelength Ellipsometers use long-life LED’s and no-moving-parts ellipsometric detectors to provide fast and reliable thin film measurements in a compact system. Film Sense Ellipsometers are easy to use, robust, and affordable, making them ideal for measurements in the research lab, classroom, in situ processing environments, industrial control, and more. For more information, ...

In this brief video, we demonstrate in situ real-time thickness monitoring during Atomic Layer Etching (ALE), using a Film Sense FS-1 Multi-Wavelength Ellipsometer. This experiment was performed in collaboration with Dr. Sumit Agarwal, and his student Ryan Gasvoda, at the Colorado School of Mines

The Film Sense FS-XY150 combines an FS‑1™ Multi-Wavelength Ellipsometer with a compact mapping stage to provide fast, accurate, and reliable film thickness uniformity measurements across a wafer.

Using 3D animation, the fundamentals of polarized light and ellipsometry are presented.